DocumentCode
329239
Title
A Microsensor With Integrated Heat Sink And Flow Guide For Gas Flow Sensing Applications
Author
Qiu, Li ; Obermeier, Ernst ; Schubert, Axel
Author_Institution
Technical University of Berlin
Volume
1
fYear
1995
fDate
25-29 Jun 1995
Firstpage
520
Lastpage
523
Keywords
Etching; Fluid flow; Fluid flow measurement; Heat sinks; Microsensors; Resistors; Temperature distribution; Temperature sensors; Thermal sensors; Velocity measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.717272
Filename
717272
Link To Document