DocumentCode
329243
Title
Silicon Tube Structures For A Fluid Density Sensor
Author
Enoksson, Peter ; Stemme, Goran ; Stemme, Erik
Author_Institution
Royal Institute of Technology
Volume
1
fYear
1995
fDate
25-29 Jun 1995
Firstpage
540
Lastpage
543
Keywords
Anisotropic magnetoresistance; Crystallization; Density measurement; Frequency measurement; Q factor; Resonance; Resonant frequency; Sensor systems; Silicon; Vibration measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.717279
Filename
717279
Link To Document