Title :
Diode Integrated Capacitive Accelerometer with Reduced Structural Distortion
Author :
Shoji, Y. ; Yosida, M. ; Minami, K. ; Esashi, M.
Author_Institution :
Tohoku University
Keywords :
Accelerometers; Bonding processes; Capacitive sensors; Capacitors; Circuits; Diodes; Electrodes; Glass; Silicon; Thermal stresses;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717291
