DocumentCode

329253

Title

Diode Integrated Capacitive Accelerometer with Reduced Structural Distortion

Author

Shoji, Y. ; Yosida, M. ; Minami, K. ; Esashi, M.

Author_Institution

Tohoku University

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

581

Lastpage

584

Keywords

Accelerometers; Bonding processes; Capacitive sensors; Capacitors; Circuits; Diodes; Electrodes; Glass; Silicon; Thermal stresses;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717291

Filename

717291