DocumentCode
329255
Title
A High-performance, Low Cost Capacitive Accelerometer Trimmed Using Nonvolatile Potentiometers (EEPOT´s)
Author
Tschan, Thomas ; Urbanek, Wolfram ; Lim, Mel ; Allen, Henry ; Knutti, James
Author_Institution
Silicon Microstructures Inc.
Volume
1
fYear
1995
fDate
25-29 Jun 1995
Firstpage
601
Lastpage
603
Keywords
Accelerometers; Application specific integrated circuits; Costs; Etching; Manufacturing processes; Piezoresistance; Potentiometers; Silicon; Temperature dependence; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.717296
Filename
717296
Link To Document