DocumentCode
329260
Title
Capacitive Silicon Differential Pressure Sensor
Author
Hermann, J. ; Bourgeois, C. ; Porret, F. ; Kloeck, B.
Author_Institution
CSEM Centre Suisse d´´Electronique et de Microtechnique
Volume
1
fYear
1995
fDate
25-29 Jun 1995
Firstpage
620
Lastpage
623
Keywords
Application specific integrated circuits; Biomembranes; Capacitive sensors; Frequency; Mechanical sensors; Oscillators; Piezoresistance; Sensor systems; Silicon; Vibrations;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.717304
Filename
717304
Link To Document