DocumentCode
329262
Title
Capacitive Pressure Sensor Mock-up Without Compensation Circuits
Author
Blasquez, G. ; Pons, P. ; Menini, Ph ; Herbst, D. ; Schulz, M. ; Hofflinger, B.
Author_Institution
CNRS/LAAS
Volume
1
fYear
1995
fDate
25-29 Jun 1995
Firstpage
628
Lastpage
631
Keywords
CMOS integrated circuits; Capacitance; Capacitive sensors; Chromium; Energy consumption; Silicon; Switched capacitor circuits; Temperature sensors; Thermal sensors; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.717308
Filename
717308
Link To Document