Title :
Capacitive Pressure Sensor Mock-up Without Compensation Circuits
Author :
Blasquez, G. ; Pons, P. ; Menini, Ph ; Herbst, D. ; Schulz, M. ; Hofflinger, B.
Author_Institution :
CNRS/LAAS
Keywords :
CMOS integrated circuits; Capacitance; Capacitive sensors; Chromium; Energy consumption; Silicon; Switched capacitor circuits; Temperature sensors; Thermal sensors; Voltage;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717308
