DocumentCode

329267

Title

A Miniaturised Fabry Perot AFM Sensor

Author

Ruf, A. ; Abraham, M. ; Lacher, M. ; Mayr, K. ; Zetterer, Th

Author_Institution

IMM Institute of Microtechnology GmbH

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

660

Lastpage

663

Keywords

Atomic force microscopy; Etching; Interference; Mirrors; Nickel; Optical films; Optical interferometry; Optical sensors; Sensor arrays; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717316

Filename

717316