DocumentCode
3292702
Title
Design equations for the on-state capacitance of the RF MEMS shunt switch
Author
El-Din, Muhammad A Salah ; Safwat, Amr M E ; Ragaie, Hani F. ; Haddara, Hisham
Author_Institution
Dept. of Electron. & Commun. Eng., Ain Shams Univ., Cairo, Egypt
fYear
2004
fDate
16-18 March 2004
Lastpage
42374
Abstract
A simple methodology is developed to determine the value of MEMS shunt switch on-state capacitance using established design equations for planar transmission lines. Results agreed with the on-state values provided by 3D electrostatic simulator with an error of less than 4%.
Keywords
capacitor switching; microswitches; transmission lines; 3D electrostatic simulator; RF MEMS shunt switch on-state capacitance; planar transmission line; radiofrequency microelectromechanical systems; Capacitance; Circuit simulation; Communication switching; Equations; Micromechanical devices; Microstrip; Radio frequency; Radiofrequency microelectromechanical systems; Shunt (electrical); Switches;
fLanguage
English
Publisher
ieee
Conference_Titel
Radio Science Conference, 2004. NRSC 2004. Proceedings of the Twenty-First National
Print_ISBN
977-5031-77-X
Type
conf
DOI
10.1109/NRSC.2004.1321862
Filename
1321862
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