Title :
Multisensor Microsystem For Contaminants In Air
Author :
Althainz, P. ; Goschnick, J. ; Ehrmann, S. ; Ache, H.J.
Author_Institution :
Forschungszentrum Karlsruhe, lnstitut fur Radiochemie
Keywords :
Biomembranes; Ceramics; Chemical sensors; Fabrication; Gas detectors; Gases; Heating; Sensor arrays; Sensor systems; Temperature sensors;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717327
