CMOS sensor array for bi-directional communication with electrically active cells

Author

Yegin, U. ; Schindler, Marco ; Ingebrandt, S. ; Eick, S. ; Kim, Soo Kyung ; Hwang, C.S. ; Schindler, C. ; Schubert, Jeffrey ; Schroeder, H. ; Kim, Soo Kyung ; Offenhauser, A.

Author_Institution

Inst. of Bio- & Nanosystems 2 (IBN2), Forschungszentrum Julich GmbH, Julich

fYear

2009

fDate

18-20 March 2009

Firstpage

237

Lastpage

240

Abstract

In this paper, we introduce a densely packed array of floating gate field effect transistors integrated on a silicon chip (FG-FET) used for recording electrical signals from electrogenic cells and stimulating them. The chip called CALIBUR was manufactured using a commercial 2 poly - 3 metal CMOS process. Further post processing for the optimization of the capacitive coupling between the cells by using thin film high-k materials and chip encapsulation were performed in house. The post-processing step includes the development of a lift-off process for the deposition of Pt as a base layer for the high-k materials and the actual deposition of the high-k materials.

Keywords

CMOS image sensors; CMOS integrated circuits; encapsulation; field effect transistors; high-k dielectric thin films; optimisation; sensor arrays; CALIBUR; CMOS sensor array; bidirectional communication; capacitive coupling; chip encapsulation; densely packed array; electrical signal recording; electrically active cells; electrogenic cells; floating gate field effect transistors; lift-off process; optimization; silicon chip; thin film high-k materials; Bidirectional control; CMOS process; Encapsulation; FETs; High K dielectric materials; High-K gate dielectrics; Manufacturing processes; Sensor arrays; Silicon; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultimate Integration of Silicon, 2009. ULIS 2009. 10th International Conference on

Conference_Location

Aachen

Print_ISBN

978-1-4244-3704-7

Type

conf

DOI

10.1109/ULIS.2009.4897580

Filename

4897580