DocumentCode

329296

Title

Sensor Controlled Processes In Chemical Microreactors

Author

Mobius, H. ; Ehrfeld, W. ; Hessel, V. ; Richter, Thomas

Author_Institution

IMM Institut fur Mikrotechnik GmbH

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

775

Lastpage

778

Keywords

Chemical processes; Chemical sensors; Costs; Glass; Optical device fabrication; Optical materials; Optical sensors; Polymers; Process control; Production;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717347

Filename

717347