DocumentCode

329311

Title

Si-planar-pellistor: Designs For Temperature Modulated Operation

Author

Aigner, Robert ; Dietl, Markus ; Katterloher, Rainer ; Klee, Veit

Author_Institution

Technische Universitat Munchen

Volume

1

fYear

1995

fDate

25-29 June 1995

Firstpage

839

Lastpage

842

Keywords

Chemical elements; Electric resistance; Energy consumption; Frequency; Gases; Mechanical sensors; Oxidation; Resistance heating; Temperature sensors; Thermal resistance;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Conference_Location

Stockholm, Sweden

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717363

Filename

717363