DocumentCode :
3294036
Title :
Development of Slow Start Safety Cylinder Valve to Inhibit Adiabatic Compression for Oxidized Gases
Author :
Orita, Takashi ; Yamaji, Michio ; Shinohara, Tsutomu ; Nakata, Tomohiro ; Koizumi, Masao ; Hasaka, Satoshi ; Nakabayashi, Hiroyuki
Author_Institution :
Taiyo Nippon Sanso Co., Kanagawa
fYear :
2006
fDate :
25-27 Sept. 2006
Firstpage :
235
Lastpage :
238
Abstract :
Slow start safety cylinder valve (S3V) has been developed to inhibit adiabatic compression. S3V can control to increase the pressure slower than conventional pneumatic valve (PV) during the secondary pressure goes up, so that it can inhibit adiabatic compression and decomposition of oxidized gases. We have confirmed that S3V achieved lower temperature than PV by adiabatic compression theoretically and experimentally. Therefore, S3V is convenient to secure from accidents for oxidized gases in semiconductor fabs.
Keywords :
safety devices; semiconductor device manufacture; valves; adiabatic compression; oxidized gases; semiconductor fabs; slow start safety cylinder valve; Accidents; Actuators; Explosions; Fires; Gases; Motion control; Pressure control; Safety; Temperature; Valves;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Manufacturing, 2006. ISSM 2006. IEEE International Symposium on
Conference_Location :
Tokyo
ISSN :
1523-553X
Print_ISBN :
978-4-9904138-0-4
Type :
conf
DOI :
10.1109/ISSM.2006.4493071
Filename :
4493071
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3294036
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