Framework for Event Driven Sorter Operation

Recently most manufacturing operations in FAB are done in automated manner. Following the predefined process routing information, every lot is automatically dispatched, transported, and processed by manufacturing execution system (MES). However all kinds of wafer sorting operation cannot be predefined in the route because unplanned wafer sorting is required according to the process result, condition of process equipment, or other reason. This paper describes concerns to automate sorter operation and proposes the framework to cover both planned and unplanned sorter operation in the same automated manner with event driven base.