• DocumentCode
    3294397
  • Title

    Nano-thickness Stellar Defects

  • Author

    Moriya, Tsuyoshi ; Yamawaku, Jun ; Ryu, Yoshitaka ; Nagaike, Hiroshi ; Yakushiji, Hideaki

  • Author_Institution
    Tokyo Electron AT Ltd., Nirasaki
  • fYear
    2006
  • fDate
    25-27 Sept. 2006
  • Firstpage
    309
  • Lastpage
    312
  • Abstract
    New type defects which are nanometer-thickness stellar shape defects called as the stellar defects are reported. Since the stellar defects need the center particle and the water to form, we successfully have reduced the stellar defects by reducing the particles and humidity in the chamber. These very thin defects must be key issues in the processes that we have to control nanometer thickness.
  • Keywords
    nanotechnology; semiconductor technology; center particle; nanothickness stellar defects; stellar shape defects; Crystallization; Electrons; Humidity; Large scale integration; Plasma applications; Plasma materials processing; Plasma measurements; Refrigeration; Shape; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Manufacturing, 2006. ISSM 2006. IEEE International Symposium on
  • Conference_Location
    Tokyo
  • ISSN
    1523-553X
  • Print_ISBN
    978-4-9904138-0-4
  • Type

    conf

  • DOI
    10.1109/ISSM.2006.4493092
  • Filename
    4493092
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3294397