DocumentCode
3295133
Title
Monte Carlo Simulation of Active Gas Particles Diffusion in Deep Pores
Author
Zinchenko, Constantin Yu ; Shwartz, Nataliya L. ; Yanovitskaja, Zoya Sh ; Zverev, Alexey V.
Author_Institution
Novosibirsk State Tech. Univ., Novosibirsk
fYear
2007
fDate
June 1 2007-July 5 2007
Firstpage
37
Lastpage
39
Abstract
Monte Carlo simulation of adsorption and diffusion of active gas particles in porous materials was carried out. Dependences of intensity of chemical reactions between particles on pores walls and penetration depth on pore size, adhesion coefficient and flux were analyzed.
Keywords
Monte Carlo methods; adhesion; adsorption; diffusion; porous materials; substrates; Monte Carlo simulation; active gas particles; adhesion coefficient; adsorption; deep pores; diffusion; low-k materials; porous materials; porous substrate materials; Adhesives; Atomic layer deposition; Capacitance; Chemical analysis; Chemical vapor deposition; Dielectric materials; Helium; Monte Carlo methods; Nanoporous materials; Substrates; Monte Carlo; porous dielectrics; simulation;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices and Materials, 2007. EDM '07. 8th Siberian Russian Workshop and Tutorial on
Conference_Location
Erlagol, Altai
ISSN
1815-3712
Print_ISBN
978-5-7782-0752-3
Type
conf
DOI
10.1109/SIBEDM.2007.4292901
Filename
4292901
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