Title :
A sensitive bi-reflection surface plasmon resonance waveguide sensor based on SiON
Author :
Wei Zhang ; Xiaohai Xiong ; Luping Zhu ; Mingyu Li ; Jian-Jun He
Author_Institution :
State Key Lab. of Modern Opt. Instrum., Zhejiang Univ., Hangzhou, China
Abstract :
A high-performance bi-reflection surface plasmon resonance waveguide sensor based on SiON was proposed. The thickness of Ag is optimized. The detection limit and the sensitivity are improved at the expense of loss using two planar reflection surfaces. A sensitivity of 103.8degree/RIU or 2.86×104dB/RIU as well as a refractive index variation of 1×10-5RIU were measured.
Keywords :
biosensors; chemical sensors; refractive index; silicon compounds; silver; surface plasmon resonance; Ag; SiON; detection limit; planar reflection surfaces; refractive index; surface plasmon resonance waveguide sensor; Metals; Optical surface waves; Optical waveguides; Reflection; Refractive index; Sensitivity; Silicon; SPR; active metal; bi-reflection;
Conference_Titel :
Optical Communications and Networks (ICOCN), 2013 12th International Conference on
Conference_Location :
Chengdu
DOI :
10.1109/ICOCN.2013.6617199