DocumentCode
3300330
Title
Theory and numerical analysis of bulk acoustic wave multilayer composite resonator structure
Author
Mansfeld, G.D. ; Alekseev, S.G.
Author_Institution
Inst. of Radio Eng. & Electron., Acad. of Sci., Moscow, Russia
Volume
2
fYear
1997
fDate
5-8 Oct 1997
Firstpage
891
Abstract
Rigorous analytical expressions describing multilayer BAW microwave composite resonator-filter with input and output electrodes and taking into account wave properties and acoustic losses of all layers of the structure are obtained. The results are represented in the form of simple Z-coefficients connecting input and output voltages and currents. A special case of the multilayer λ/4 substrate providing one mode operation is analyzed and discussed. All the results are illustrated with numerical calculations
Keywords
acoustic microwave devices; acoustic resonator filters; bulk acoustic wave devices; microwave filters; Z-coefficients; acoustic losses; bulk acoustic wave multilayer composite resonator; currents; input electrodes; multilayer λ/4 substrate; numerical analysis; numerical calculations; one mode operation; output electrodes; voltages; Acoustic waves; Electrodes; Joining processes; Nonhomogeneous media; Numerical analysis; Q factor; Stress; Substrates; Transistors; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE
Conference_Location
Toronto, Ont.
ISSN
1051-0117
Print_ISBN
0-7803-4153-8
Type
conf
DOI
10.1109/ULTSYM.1997.661724
Filename
661724
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