• DocumentCode
    3300826
  • Title

    Rejection of aliased disturbances in a pulsed light source

  • Author

    Riggs, Daniel J. ; Bitmead, Robert R.

  • Author_Institution
    Cymer, Inc., San Diego, CA, USA
  • fYear
    2009
  • fDate
    15-18 Dec. 2009
  • Firstpage
    8148
  • Lastpage
    8153
  • Abstract
    We study a disturbance rejection problem in a pulsed light source with the aim of yielding improved performance over existing control techniques. The disturbances of interest include an offset with reset properties and sinusoids which appear aliased in the measured data. The light source is pulsed at varying pulse rates yet actuators move in continuous-time, yielding a system which blends aspects of continuous-time and variable data rate discrete-time. We employ continuous-discrete Kalman filtering ideas for state estimation and establish and solve a regularized minimum variance control problem under a disturbance rejection framework. We show that the proposed controller has the capacity to remove aliased sinusoids from the measured output and yields improved performance over existing light source algorithms.
  • Keywords
    Kalman filters; actuators; light sources; state estimation; actuators; aliased disturbances rejection; continuous discrete Kalman filtering; minimum variance control; pulsed light source; state estimation; Actuators; Feedback control; Frequency; Kalman filters; Light sources; Lighting control; Lithography; Pulse measurements; Throughput; Ultraviolet sources;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Decision and Control, 2009 held jointly with the 2009 28th Chinese Control Conference. CDC/CCC 2009. Proceedings of the 48th IEEE Conference on
  • Conference_Location
    Shanghai
  • ISSN
    0191-2216
  • Print_ISBN
    978-1-4244-3871-6
  • Electronic_ISBN
    0191-2216
  • Type

    conf

  • DOI
    10.1109/CDC.2009.5399935
  • Filename
    5399935