DocumentCode
3306013
Title
Developing and Integrating TCAD Applications with the Semiconductor Wafer Representation
Author
Bonning, D. ; Chin, G. ; Cottle, R. ; Dietrich, W. ; Duvall, S. ; Giles, M. ; Harris, R. ; Karasick, M. ; Khalil, N. ; Law, M. ; McLennan, M.J. ; Mozumder, P.K. ; Nackman, L. ; Nassif, S. ; Rajan, V.T. ; Schroeder, D. ; Tremain, R. ; Walker, D.M.H. ; Wang
Author_Institution
Texas Instruments
fYear
1992
fDate
31 May-1 Jun 1992
Firstpage
199
Lastpage
204
Keywords
Computer aided manufacturing; Data structures; Geometry; Instruments; Physics; Prototypes; Semiconductor device modeling; Software prototyping; Software tools; Standards development;
fLanguage
English
Publisher
ieee
Conference_Titel
Numerical Modeling of Processes and Devices for Integrated Circuits, 1992. NUPAD IV. Workshop on
Print_ISBN
0-7803-0516-7
Type
conf
DOI
10.1109/NUPAD.1992.674104
Filename
674104
Link To Document