DocumentCode
330631
Title
MEMS: From Research To Applications
Author
Sandmaier, H. ; Lang, W.
Author_Institution
Hahn Schickard Gesellschaft
fYear
1998
fDate
13-16 July 1998
Firstpage
52
Lastpage
53
Keywords
Actuators; Costs; Europe; Manufacturing industries; Micromechanical devices; Product development; Production; Prototypes; Research and development; World Wide Web;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location
Kyoungju, South Korea
Print_ISBN
4-930813-83-2
Type
conf
DOI
10.1109/IMNC.1998.729958
Filename
729958
Link To Document