Micro-nano-integration based on automated serial assembly

Within this paper an approach for micro-nanointegration of MEMS-based devices or smart miniaturised systems is suggested. In order to overcome the limits of conventional, silicon-based MEMS manufacturing techniques, automated serial nano-assembly processes can be applied. The process chain of such a technique and solutions for key issues with respect to automation are presented. This involves both the key processes and the infrastructure for assembly on the nanoscale. As an application example, results from the automated assembly of carbon nanotube (CNT) based devices in the scanning electron microscope (SEM) are provided.