Mixed oxide Pt/(Ti-W-O)/SiC based MROSiC device for hydrocarbon gas sensing

Author

Kandasamy, S. ; Trinchi, A. ; Comini, E. ; Pandolfi, L. ; Wlodarski, W. ; Sberveglieri, G. ; Kaciulis, S.

Author_Institution

Sch. of Electr. & Comput. Eng., RMIT Univ., Melbourne, Vic.

fYear

2005

fDate

Oct. 30 2005-Nov. 3 2005

Abstract

A highly sensitive gas sensor employing mixed oxide (Ti-W-O) has been developed for the detection of hydrocarbons. The sensing performance of the Pt/(Ti-W-O)/SiC based metal reactive oxide silicon carbide (MROSiC) devices has been investigated as a function of temperature and different concentration of propene in synthetic air. When operated at 420degC, a 2.52V shift was observed when 1% propene was introduced into an ambient containing synthetic air. The changes in the barrier height of the device were 65.5meV, approximately two times larger for the same hydrogen concentration. Material characterization of the mixed oxide was performed using atomic force microscopy (AFM) and X-ray photoemission spectroscopy (XPS). We have found that the mixed oxide (Ti-W-O) showed higher catalytic activity when compared to the single compound of TiO₂ and WO₃, thus increasing the rate of dehydrogenation of the hydrocarbon

Keywords

atomic force microscopy; catalysis; gas sensors; hydrogen compounds; organic compounds; oxygen; photoelectron spectroscopy; platinum; silicon compounds; titanium; tungsten; 2.52 V; 420 C; 65.5 meV; Pt-TiWO-SiC; X-ray photoemission spectroscopy; atomic force microscopy; catalytic activity; dehydrogenation rate; hydrocarbon gas sensing; metal reactive oxide silicon carbide device; Atomic force microscopy; Computer aided manufacturing; Gas detectors; Hydrocarbons; Hydrogen; Intelligent sensors; Lead compounds; Nanostructured materials; Silicon carbide; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2005 IEEE

Conference_Location

Irvine, CA

Print_ISBN

0-7803-9056-3

Type

conf

DOI

10.1109/ICSENS.2005.1597954

Filename

1597954