DocumentCode

330649

Title

Novel Fabrication Process Of Freestanding Metallic Microstructures Using Double Electroplating

Author

Baek, Chang-Wook ; Kim, Yong-Kweon

Author_Institution

Seoul National University

fYear

1998

fDate

13-16 July 1998

Firstpage

87

Lastpage

88

Keywords

Electrodes; Fabrication; Gold; Microactuators; Microstructure; Nickel; Prototypes; Resists; Shape control; Strips;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

conf

DOI

10.1109/IMNC.1998.729982

Filename

729982