DocumentCode

330650

Title

Resonance Characteristics Of Micro Cantilever In Liquid

Author

Hirai, Y. ; Mori, R. ; Kikuta, H. ; Kato, N. ; Inoue, Ken ; Tanaka, Y.

Author_Institution

Osaka Prefecture University

fYear

1998

fDate

13-16 July 1998

Firstpage

89

Lastpage

90

Keywords

Damping; Drag; Effective mass; Force measurement; Frequency; Optical films; Resonance; Thermal factors; Thermal force; Water;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

conf

DOI

10.1109/IMNC.1998.729983

Filename

729983