• DocumentCode
    330652
  • Title

    Proposal Of The Coma Aberration Dependent Overlay Error Compensation Technology

  • Author

    Asai, Naoko ; Hasegawa, Norio ; Gotoh, Yasuko ; Satoh, Hidetoshi ; Hayano, Katsuya ; Imai, Akira ; Okazaki, Shinji

  • Author_Institution
    Hitachi, Ltd.
  • fYear
    1998
  • fDate
    13-16 July 1998
  • Firstpage
    93
  • Lastpage
    94
  • Keywords
    Distortion measurement; Error compensation; Frequency dependence; Laboratories; Lenses; Lighting; Position measurement; Proposals; Semiconductor device measurement; Shape;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 1998 International
  • Conference_Location
    Kyoungju, South Korea
  • Print_ISBN
    4-930813-83-2
  • Type

    conf

  • DOI
    10.1109/IMNC.1998.729986
  • Filename
    729986
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=330652