Printing Sub-100 Nanometer Features Near-Field Photolithography

Author

Tanaka, Shuji ; Nakao, Masayuki ; Hatamura, Yotaro ; Komuro, Masanori ; Hiroshima, Hiroshi ; Hatakeyama, Masahiro

Author_Institution

The Univ. of Tokyo

fYear

1998

fDate

13-16 July 1998

Firstpage

100

Lastpage

101

Keywords

Contamination; Costs; Diffraction; Equations; Laser beams; Lithography; Optical surface waves; Plastics; Printing; Resists;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

DOI

10.1109/IMNC.1998.729991

Filename

729991

Link To Document