DocumentCode

330674

Title

Fabrication Of Silicon Quantum Dots On Oxide And Nitride

Author

Kim, Ilgweon ; Kim, Hyungsik ; Lee, Jongho ; Shin, Hyungcheol

Author_Institution

KAIST

fYear

1998

fDate

13-16 July 1998

Firstpage

136

Lastpage

137

Keywords

Chemicals; Fabrication; Quantum dots; Rough surfaces; Silicon; Substrates; Surface roughness; Surface treatment; Temperature; US Department of Transportation;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

conf

DOI

10.1109/IMNC.1998.730011

Filename

730011