DocumentCode

330684

Title

Fabrication Of Nanometer Scale Structure Using Thin Film Stress

Author

Park, Dong-Il ; Hahm, Sung-Ho ; Lee, Jong-Hyun ; Lee, Jung-Hee

Author_Institution

Kyungpook National University

fYear

1998

fDate

13-16 July 1998

Firstpage

156

Lastpage

157

Keywords

Annealing; Compressive stress; Dry etching; Fabrication; Lithography; Nanostructures; Temperature control; Tensile stress; Thermal stresses; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

conf

DOI

10.1109/IMNC.1998.730021

Filename

730021