DocumentCode
330688
Title
Nanometer-scale Lithography Of The Ultrathin Films With Atomic Force Microscopy
Author
Kim, Jinchul ; Lee, Haiwon ; Shin, Yongwoo ; Park, Sunwoo
Author_Institution
Hanyang University
fYear
1998
fDate
13-16 July 1998
Firstpage
164
Lastpage
165
Keywords
Atomic force microscopy; Chemical engineering; Chemical processes; Lithography; Organic chemicals; Resists; Substrates; Surface resistance; Thermal force; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location
Kyoungju, South Korea
Print_ISBN
4-930813-83-2
Type
conf
DOI
10.1109/IMNC.1998.730025
Filename
730025
Link To Document