DocumentCode

330693

Title

A New Micromachining Technology Using

Author

Lee, Sangwoo ; Park, Sangjun ; Cho, Dong-Il

Author_Institution

Seoul National University

fYear

1998

fDate

13-16 July 1998

Firstpage

174

Lastpage

175

Keywords

Anisotropic magnetoresistance; Bridges; Crystal microstructure; Crystallization; Crystallography; Micromachining; Passivation; Shape; Silicon; Wet etching;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

conf

DOI

10.1109/IMNC.1998.730030

Filename

730030