A CMOS Compatible Capacitive Silicon Accelerometer With Polysilicon Rib-Style Flexures

Author

Kim, Seokyu ; Yee, Youngjoo ; Kim, Hyeoncheol ; Chun, Kukjin

Author_Institution

Kong-Hwa Ltd.

fYear

1998

fDate

13-16 July 1998

Firstpage

176

Lastpage

177

Keywords

Accelerometers; Biomembranes; CMOS process; Capacitance; Capacitors; Circuits; Electrodes; Etching; Fabrication; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

DOI

10.1109/IMNC.1998.730031

Filename

730031

Link To Document