Fabrication Of Bimetallic Cantilevers For Chemical Sensors

Author

Jung, M.Y. ; Kim, D.W. ; Choi, S.S. ; Kang, O.J. ; Suh, Y.D. ; Kuk, Y.

Author_Institution

Sun Moon University

fYear

1998

fDate

13-16 July 1998

Firstpage

180

Lastpage

181

Keywords

Chemical sensors; Detectors; Etching; Fabrication; Physics; Probes; Resonance; Resonant frequency; Temperature; Thermal sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

DOI

10.1109/IMNC.1998.730033

Filename

730033

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