DocumentCode
330697
Title
Fabrication Of Silicon Micro-Probe For Vertical Probe Card Application
Author
Kim, Yong-Dae ; Sim, Jun-Hwan ; Nam, Jae-Woo ; Lee, Jong-Hyun
Author_Institution
Lumsonic Co. Ltd.
fYear
1998
fDate
13-16 July 1998
Firstpage
182
Lastpage
183
Keywords
Annealing; Biomembranes; Components, packaging, and manufacturing technology; Electrical resistance measurement; Fabrication; Probes; Silicon; Temperature; Testing; Wet etching;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location
Kyoungju, South Korea
Print_ISBN
4-930813-83-2
Type
conf
DOI
10.1109/IMNC.1998.730034
Filename
730034
Link To Document