DocumentCode :
330700
Title :
A Capacitive Silicon Microaccelerometer With Force Balancing Electrodes
Author :
Ha, Byeoungju ; Oh, Yongsoo ; Lee, Byeungleul ; Shinn, Meenam ; Baek, Seogsoon ; Song, Cimoo
Author_Institution :
Samsung Advanced Institute of Technology
fYear :
1998
fDate :
13-16 July 1998
Firstpage :
188
Lastpage :
189
Keywords :
Acceleration; Accelerometers; Bandwidth; Capacitance; Capacitors; Electrodes; Linearity; Noise measurement; Sensor phenomena and characterization; Silicon;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
Type :
conf
DOI :
10.1109/IMNC.1998.730037
Filename :
730037
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=330700
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