• DocumentCode
    330700
  • Title

    A Capacitive Silicon Microaccelerometer With Force Balancing Electrodes

  • Author

    Ha, Byeoungju ; Oh, Yongsoo ; Lee, Byeungleul ; Shinn, Meenam ; Baek, Seogsoon ; Song, Cimoo

  • Author_Institution
    Samsung Advanced Institute of Technology
  • fYear
    1998
  • fDate
    13-16 July 1998
  • Firstpage
    188
  • Lastpage
    189
  • Keywords
    Acceleration; Accelerometers; Bandwidth; Capacitance; Capacitors; Electrodes; Linearity; Noise measurement; Sensor phenomena and characterization; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 1998 International
  • Conference_Location
    Kyoungju, South Korea
  • Print_ISBN
    4-930813-83-2
  • Type

    conf

  • DOI
    10.1109/IMNC.1998.730037
  • Filename
    730037
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=330700