DocumentCode

330702

Title

Micromachined Optical Components Integrated With Photodiode

Author

Sasaki, M. ; Arai, Y. ; Takebe, H. ; Hane, K.

Author_Institution

Tohoku University

fYear

1998

fDate

13-16 July 1998

Firstpage

192

Lastpage

193

Keywords

Image sensors; Laser beams; Laser feedback; Mechatronics; Monitoring; Optical devices; Photoconductivity; Photodiodes; Precision engineering; Shape memory alloys;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

conf

DOI

10.1109/IMNC.1998.730039

Filename

730039