• DocumentCode
    330723
  • Title

    Facet Formation In Selectively Overgrown Silicon By Reduced Pressure Chemical Vapor Deposition

  • Author

    Song, S. ; Lee, S. ; Ryum, B. ; Yoon, E.

  • Author_Institution
    Seoul National University
  • fYear
    1998
  • fDate
    13-16 July 1998
  • Firstpage
    240
  • Lastpage
    241
  • Keywords
    Application specific integrated circuits; Chemical technology; Chemical vapor deposition; Diffraction; Fabrication; Integrated circuit technology; Isolation technology; Materials science and technology; Pattern analysis; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 1998 International
  • Conference_Location
    Kyoungju, South Korea
  • Print_ISBN
    4-930813-83-2
  • Type

    conf

  • DOI
    10.1109/IMNC.1998.730061
  • Filename
    730061
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=330723