• DocumentCode
    330730
  • Title

    Deposition And Patterning Technique For Realization Of PZT Thick Film Micro Actuator

  • Author

    Maeda, Ryutaro ; Chu, J. ; Schroth, A. ; Akedo, J. ; Ichiki, M. ; Wang, Z. ; Yonekubo, S.

  • Author_Institution
    Division Surface and Interface Technology, Mechanical Engineering Laboratory
  • fYear
    1998
  • fDate
    13-16 July 1998
  • Firstpage
    255
  • Lastpage
    255
  • Keywords
    Electromechanical systems; Fabrication; Mechanical engineering; Microactuators; Performance evaluation; Residual stresses; Structural beams; Thick films; Wet etching;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 1998 International
  • Conference_Location
    Kyoungju, South Korea
  • Print_ISBN
    4-930813-83-2
  • Type

    conf

  • DOI
    10.1109/IMNC.1998.730068
  • Filename
    730068
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=330730