DocumentCode

330747

Title

Electron-Beam-Induced Deposition For Nanodevice Formation

Author

Komuro, M.

Author_Institution

Electrotechnical Laboratory

fYear

1998

fDate

13-16 July 1998

Firstpage

287

Lastpage

287

Keywords

Capacitance; Controllability; Electrodes; Electrons; Etching; Nanoscale devices; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

conf

DOI

10.1109/IMNC.1998.730085

Filename

730085