DocumentCode
330753
Title
Selectively Formed InAs Quantum Dot Arrays For Device Application
Author
Hahn, Cheol Koo ; Park, Young Ju ; Park, Kyung Hyun ; Hyun, Chan Kyung ; Kim, Eun Kyu ; Min, Suk-Ki ; Park, Jung Ho
Author_Institution
Korea Institute of Science and Technology
fYear
1998
fDate
13-16 July 1998
Firstpage
299
Lastpage
300
Keywords
Atomic force microscopy; Atomic layer deposition; Fabrication; Gallium arsenide; Materials science and technology; Molecular beam epitaxial growth; Quantum dots; Scanning electron microscopy; Substrates; US Department of Transportation;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location
Kyoungju, South Korea
Print_ISBN
4-930813-83-2
Type
conf
DOI
10.1109/IMNC.1998.730091
Filename
730091
Link To Document