DocumentCode
330771
Title
Quantitative Measuring Ray Shift Aspect Of Coma Aberration Utilizing Electrical Probe With Zero-Crossing Method
Author
Nakao, Shuji ; Tsujita, Kouichirou ; Wakamiya, Wataru
Author_Institution
ULSI Laboratory, Mitsubishi Electric Corporation
fYear
1998
fDate
13-16 July 1998
Firstpage
336
Lastpage
337
Keywords
Distortion measurement; Electric variables measurement; Electrical resistance measurement; Laboratories; Optical distortion; Optical films; Probes; Size measurement; Ultra large scale integration; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location
Kyoungju, South Korea
Print_ISBN
4-930813-83-2
Type
conf
DOI
10.1109/IMNC.1998.730110
Filename
730110
Link To Document