The inversion-law in MEMS microstrip array antenna manufacturing

In the microwave system it is very important to the manufacture of MEMS microstrip array antennas, microstrip array antenna´s geometrical parameters are closely related to its electrical parameters. In the manufacturing process of MEMS, it is very difficult to measure the geometry parameters. However, currently it is easy to test the electrical parameters of microwave systems. The real geometry parameters of the microstrip array antenna were obtained through the simulation results of HFSS software and the testing results of microstrip array antenna´s electrical parameters. The geometrical dimension error of the microstrip antenna´s structure is determined. In this paper, according to the analysis and test results of C-band microstrip array antenna, the inversion law in the microstrip array antenna manufacturing is obtained.