DocumentCode
3316384
Title
Electrical potential distribution in magnetron discharge gap of the direct current
Author
Zhukov, V.V. ; Krivobokov, V.V. ; Patsevich, V.V. ; Yanin, S.N.
Author_Institution
Nucl. Phys. Inst., Tomsk Polytech. Univ., Tomsk
fYear
2003
fDate
2003
Firstpage
241
Lastpage
243
Abstract
In the given paper discharge processes in magnetron of the direct current are considered and the results of the experiments on investigating potential distribution near the target are described
Keywords
discharges (electric); electric potential; magnetrons; direct current; electric potential distribution; magnetron discharge gap; Anodes; Cathodes; Diodes; Electric potential; Electrons; Magnetic fields; Magnetic materials; Plasmas; Space charge; Spraying;
fLanguage
English
Publisher
ieee
Conference_Titel
Modern Techniques and Technologies, 2003. MTT 2003. Proceedings of the 9th International Scientific and Practical Conference of Students, Post-graduates and Young Scientists
Conference_Location
Tomsk
Print_ISBN
0-7803-7669-2
Type
conf
DOI
10.1109/SPCMTT.2003.1438212
Filename
1438212
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