DocumentCode
3317656
Title
Interfacial force sensor with force-feedback control
Author
Joyce, S.A. ; Houston, J.E. ; Smith, B.K.
Author_Institution
Sandia Nat. Lab., Albuquerque, NM, USA
fYear
1990
fDate
9-12 Dec. 1990
Firstpage
621
Lastpage
624
Abstract
A novel interfacial force microscope capable of measuring the forces between two surfaces over the entire range of surface separations, up to contact, has been developed. The design is centered around a differential capacitance displacement sensor where the common capacitor plate is supported by torsion bars. A force-feedback control system balances the interfacial forces at the sensor, maintaining the common capacitor plate at its rest position. This control eliminates the instability which occurs with the conventional cantilever-based force sensors when the attractive force gradient exceeds the mechanical stiffness of the cantilever. The ability to measure interfacial forces at surface separations smaller than this instability point using the feedback control is demonstrated.<>
Keywords
atomic force microscopy; force measurement; differential capacitance displacement sensor; force sensors; force-feedback control; instability point; interfacial force microscope; surface separations; torsion bars; Bars; Capacitance; Capacitive sensors; Capacitors; Control systems; Force control; Force measurement; Force sensors; Mechanical sensors; Microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1990. IEDM '90. Technical Digest., International
Conference_Location
San Francisco, CA, USA
ISSN
0163-1918
Type
conf
DOI
10.1109/IEDM.1990.237122
Filename
237122
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