Title :
MEMS for applications in fiber optic communication
Author :
Marxer, C. ; de Rooij, N.F.
Author_Institution :
Inst. of Microtechnol., Neuchatel Univ., Switzerland
Abstract :
We discuss three MEMS based components for fiber optic communication: a reflective modulator, a 2×2 switch and a 4 channel variable attenuator. All devices take advantage of the silicon micromachining technology not only for their functionality but also to allow self aligned positioning of the single mode fibers
Keywords :
electro-optical modulation; electro-optical switches; micro-optics; micromechanical devices; optical communication equipment; optical losses; silicon; 2×2 switch; 4 channel variable attenuator; MEMS applications; MEMS based components; Si micromachining technology; fiber optic communication; reflective modulator; self aligned positioning; silicon micromachining technology; single mode fibers; Insertion loss; Micromechanical devices; Optical fiber communication; Optical fiber polarization; Optical fibers; Optical losses; Optical modulation; Optical switches; Optical waveguides; Silicon;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1998. LEOS '98. IEEE
Conference_Location :
Orlando, FL
Print_ISBN :
0-7803-4947-4
DOI :
10.1109/LEOS.1998.737715
