Dynamic response of a magnetically actuated micromachined cantilever with a Permalloy electroplated film

Author

Yu, B. ; Allegretto, W. ; Robinson, A.M.

Author_Institution

Dept. of Electr. & Comput. Eng., Alberta Univ., Edmonton, Alta., Canada

Volume

3

fYear

1999

fDate

9-12 May 1999

Firstpage

1643

Abstract

A magnetically actuated cantilever structure was designed, fabricated, and tested. The actuation of the device is based on the interaction between a Permalloy film and an external magnetic field. The device is a rectangular SiO/sub 2/ platform 1 /spl mu/m thick supported by a pair of 1 /spl mu/m thick SiO/sub 2/ cantilevers. On the top of the platform is a 5 /spl mu/m Permalloy layer deposited by electroplating. The device has large deflection angles (/spl sim/45/spl deg/) in both the static and dynamic cases, for magnetic fields of 130 G, and 3 G at resonance, respectively.

Keywords

Permalloy; electroplated coatings; magnetic thin films; microactuators; micromachining; NiFe; Permalloy electroplated film; SiO/sub 2/; SiO/sub 2/ micromachined cantilever; dynamic deflection; magnetic actuation; magnetic field; Chromium; Glass; Heating; Magnetic field measurement; Magnetic fields; Magnetic films; Magnetic resonance; Microstructure; Saturation magnetization; Torque;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical and Computer Engineering, 1999 IEEE Canadian Conference on

Conference_Location

Edmonton, Alberta, Canada

ISSN

0840-7789

Print_ISBN

0-7803-5579-2

Type

conf

DOI

10.1109/CCECE.1999.804963

Filename

804963