DocumentCode :
3321244
Title :
MEMS optical position sensor for sun tracking
Author :
Welch, David ; Christen, Jennifer Blain
Author_Institution :
Sch. of Biol. & Health Syst. Eng., Arizona State Univ., Tempe, AZ, USA
fYear :
2015
fDate :
24-27 May 2015
Firstpage :
1874
Lastpage :
1878
Abstract :
We demonstrate a sun tracking sensor fabricated in the MultiMEMS SensoNor process. The sensor uses a quadrant photodetector to determine the position of a projected shadow. Differential measurement of pairs of photodiodes allows simultaneous dual-axis readings. The sensing structure was manufactured in the commercial MultiMEMS process, so it can be easily reproduced in large quantities. The device was tested from -45° to +45° to verify performance. Results show a linear correlation between a mapped output and angle of incident light with an R2 value of 0.995. The small size, robust structure, and minimal post-processing make it well-suited for sun tracking applications.
Keywords :
microfabrication; microsensors; optical sensors; photodiodes; position measurement; sensor fusion; sun sensors; MEMS optical position sensor; MultiMEMS SensoNor process; dual-axis reading; microfabrication; photodiode; projected shadow position; quadrant photodetector; sun tracking sensor; Glass; Light sources; Micromechanical devices; Photodiodes; Sun; Testing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Circuits and Systems (ISCAS), 2015 IEEE International Symposium on
Conference_Location :
Lisbon
Type :
conf
DOI :
10.1109/ISCAS.2015.7169023
Filename :
7169023
Link To Document :
بازگشت