DocumentCode :
3321758
Title :
The case for near real-time production scheduling in a highly automated semiconductor manufacturing environment
Author :
Govind, Nirmal ; Iyer, Bala
Author_Institution :
Intel Corp., Chandler, AZ
fYear :
2005
fDate :
11-12 April 2005
Firstpage :
107
Lastpage :
112
Abstract :
The problem of scheduling wafer lots on tools in the semiconductor fabrication facility is considered. We look at the role of scheduling in the organization and identify some of the major factors that make this problem difficult to solve in the current environment. From a semiconductor manufacturing perspective, the real drivers for pursuing scheduling are identified, as we attempt to make the case for investment in solving the near real-time scheduling problem. We also take a look at some of the manufacturing requirements and the implications that these requirements have on the solution methodology. Finally, we take a brief look at some of the existing work on scheduling in the semiconductor fab and try to identify gaps that freed to be closed for the widespread use of scheduling in this industry
Keywords :
integrated circuit manufacture; organisational aspects; production control; scheduling; automated semiconductor manufacturing environment; investment; real-time production scheduling; semiconductor fabrication facility; wafer lots scheduling; Computer aided software engineering; Conductors; Fabrication; Investments; Job shop scheduling; Manufacturing automation; Manufacturing industries; Production; Semiconductor device manufacture; Space technology;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 2005 IEEE/SEMI
Conference_Location :
Munich
Print_ISBN :
0-7803-8997-2
Type :
conf
DOI :
10.1109/ASMC.2005.1438776
Filename :
1438776
Link To Document :
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