DocumentCode
3321758
Title
The case for near real-time production scheduling in a highly automated semiconductor manufacturing environment
Author
Govind, Nirmal ; Iyer, Bala
Author_Institution
Intel Corp., Chandler, AZ
fYear
2005
fDate
11-12 April 2005
Firstpage
107
Lastpage
112
Abstract
The problem of scheduling wafer lots on tools in the semiconductor fabrication facility is considered. We look at the role of scheduling in the organization and identify some of the major factors that make this problem difficult to solve in the current environment. From a semiconductor manufacturing perspective, the real drivers for pursuing scheduling are identified, as we attempt to make the case for investment in solving the near real-time scheduling problem. We also take a look at some of the manufacturing requirements and the implications that these requirements have on the solution methodology. Finally, we take a brief look at some of the existing work on scheduling in the semiconductor fab and try to identify gaps that freed to be closed for the widespread use of scheduling in this industry
Keywords
integrated circuit manufacture; organisational aspects; production control; scheduling; automated semiconductor manufacturing environment; investment; real-time production scheduling; semiconductor fabrication facility; wafer lots scheduling; Computer aided software engineering; Conductors; Fabrication; Investments; Job shop scheduling; Manufacturing automation; Manufacturing industries; Production; Semiconductor device manufacture; Space technology;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference and Workshop, 2005 IEEE/SEMI
Conference_Location
Munich
Print_ISBN
0-7803-8997-2
Type
conf
DOI
10.1109/ASMC.2005.1438776
Filename
1438776
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