DocumentCode
3324469
Title
Characterization of a n-type Field Effect Transistor made from direct growth and patterning of single wall carbon nanotubes film
Author
Tsai, Chen-Da ; Yang, Chih Sheng ; Shiau, S.H. ; Liu, C.W. ; Gau, C.
Author_Institution
Comput. Sci. & Inf. Eng., Far East Univ., Tainan County, Taiwan
Volume
2
fYear
2010
fDate
5-7 May 2010
Firstpage
589
Lastpage
593
Abstract
Characterization of a n-type Field Effect Transistor (FET) made from direct growth and patterning of a dense single wall carbon nanotubes (SWNTs) network on a silicon substrate, using alcohol as source gas, is presented. This SWNTs network film made into FET has a special feature which is significantly different from the amorphous silicon thin film transistor (TFT) or the MOSFET. The primary n-type nature of the SWNTs FET exhibits ambipolar characteristic. In addition, different sizes of channel for the FET have been made to examine if the scaling law used in TFT or MOSFET applicable. The results found that unlike the mobility of silicon film measured in TFT or MOSFET which do not depend on the size of the channel, both the mobility and the transconductance of the SWNTs film measured in FET increases with the channel width. The current device has an advantage to improve the mobility simply be making a wider channel. More discussions on the characteristics of the SWNTs film FET are provided.
Keywords
MOSFET; carbon nanotubes; elemental semiconductors; silicon; thin film transistors; FET; MOSFET; Si; alcohol; ambipolar characteristic; amorphous thin film transistor; direct growth; n-type field effect transistor; patterning; single wall carbon nanotubes film; source gas; Amorphous silicon; Carbon nanotubes; Extraterrestrial measurements; FETs; MOSFET circuits; Semiconductor films; Size measurement; Space technology; Substrates; Thin film transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Computer Communication Control and Automation (3CA), 2010 International Symposium on
Conference_Location
Tainan
Print_ISBN
978-1-4244-5565-2
Type
conf
DOI
10.1109/3CA.2010.5533748
Filename
5533748
Link To Document