Title :
Emission properties of carbon nanotubes grown on various catalytic layer-coated glass using plasma enhanced chemical vapor deposition with CO
Author :
Jae-Hee Han ; Choi, Sun Hong ; Tae Yong Lee ; Yoo, Ji-Beom ; Chong-Yun Park ; Jung, T.W. ; Kim, H.J. ; Park, Y.J. ; Han, I.T. ; Huh, J.N. ; Lee, J.H. ; Yu, SeGi ; Yi, W.K. ; Park, G.S. ; Lee, N.S. ; Kim, J.M.
Author_Institution :
Center for Nanotubes & Nanostructured Composite, Sung Kyun Kwan Univ., Suwon, South Korea
Abstract :
Vertically aligned carbon nanotube´s (CNTs) were grown on various catalytic metal coated glass substrate using plasma enhanced chemical vapor deposition (PECVD) with CO and NH3 as a carbon source and dilution and catalytic gas, respectively. Effects of growth parameters and catalytic layers on the emission properties of CNTs were investigated. CNTs on the Fe catalytic layer showed the low turn-on electric field (Eto) of 1.75 V/μm while CNT grown on invar under the same condition showed larger Eto. Growth conditions and catalytic layer were optimized for the enhancement of emission characteristics of CNTs
Keywords :
carbon nanotubes; catalysts; electron field emission; plasma CVD coatings; C; CO; Fe; Fe-Ni; NH3; carbon nanotubes; catalytic metal coating; field emission; glass substrate; invar; iron; plasma enhanced chemical vapor deposition; turn-on electric field; Carbon dioxide; Carbon nanotubes; Chemical vapor deposition; Chromium; Electron emission; Glass; Iron; Plasma chemistry; Plasma properties; Plasma temperature;
Conference_Titel :
Vacuum Microelectronics Conference, 2001. IVMC 2001. Proceedings of the 14th International
Conference_Location :
Davis, CA
Print_ISBN :
0-7803-7197-6
DOI :
10.1109/IVMC.2001.939639
